CRC Press
Fabrication of Silicon Microprobes for Optical Near-Field Applications (English, Phan Ngoc Minh | Ono Takahito | Esashi Masayoshi)
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About the Book
Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical perf…
ISBN: 9780849311543
Book Specifications
| ISBN-13 | 9780849311543 |
| ISBN-10 | 0849311543 |
| Publisher | CRC Press |
| Category | CRC Press |
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