Vieweg+teubner Verlag
Silizium-Halbleitertechnologie (English, Ulrich Hilleringmann)
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Book Details
| ISBN-13 | 9783519001492 |
| ISBN-10 | 3519001497 |
Product Description
About the Book
Das vorliegende Studien skript "Silizium-Halbleitertechnologie" ist aus der Vorlesung "Halbleitertechnologie" entstanden, die erstmalig im Wintersemester 1989/90 von Prof. Dr.-Ing. K. Schumacher an der Universität Dortmund gehalten wurde. Um die rasante Entwicklung der Proze technik berücksichtigen zu können, ist der Inhalt der inzwischen auf zwei Semester ausgedehnten Vorlesung um fortschrittliche Integra- tionstechniken erweitert worden. Ziel d…
ISBN: 9783519001492
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